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1

Two-Point Resolution with Partially Coherent Light

GRIMES, DIANA NYYSSONEN, THOMPSON, BRIAN J.

Journal:

Journal of the Optical Society of America

Year:

1967

Language:

english

File:

PDF, 444 KB

english, 1967

2

Practical Method For Edge Detection And Focusing For Linewidth Measurements On Wafers

Nyyssonen, Diana

Journal:

Optical Engineering

Year:

1987

Language:

english

File:

PDF, 2.63 MB

english, 1987

3

SPIE Proceedings [SPIE Developments in Semiconductor Microlithography - San Jose (Thursday 1 January 1976)] Developments in Semiconductor Microlithography - The Effects Of Operating Parameters On Line-Width Measurements With An Optical Microscope

Nyyssonen, Diana, Jerke, John M., Giffin, James W.

Year:

1976

Language:

english

File:

PDF, 47 KB

english, 1976

4

SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Integrated Circuit Metrology, Inspection, and Process Control VII - Phase image metrology with a modified coherence probe microscope

Nyyssonen, Diana, Seligson, Joel L., Mazor, Isaac, Postek, Michael T.

Year:

1993

Language:

english

File:

PDF, 536 KB

english, 1993

5

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Absolute 2-D Sub-Micron Metrology For Electron Beam Lithography

Raugh, Michael R., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 555 KB

english, 1984

6

Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory

Nyyssonen, Diana, Kirk†, Chris P.

Journal:

Journal of the Optical Society of America A

Year:

1988

Language:

english

File:

PDF, 2.56 MB

english, 1988

7

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Double Film Thickness Measurements In The Semiconductor Industry

Spanier, Richard F., Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 343 KB

english, 1982

8

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Design Of An Optical Linewidth Standard Reference Material For Wafers

Nyyssonen, Diana, Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 443 KB

english, 1982

9

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Direct-Write Electron Beam Patterning Reregistration And Metrology

Glendinning, William B., Goodreau, Wayne M., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 6.84 MB

english, 1984

10

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Fourier Transform Method For Optical Linewidth Measurement

Guillaume, M . E., Noailly, N. M., Reynaud, J. C., Buevoz, J. L., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 281 KB

english, 1984

11

SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Integrated Circuit Metrology, Inspection, and Process Control VII - Developments in 2D AFM metrology

Nyyssonen, Diana, Postek, Michael T.

Year:

1993

Language:

english

File:

PDF, 360 KB

english, 1993

12

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - An Ellipsometry System For High Accuracy Metrology Of Thin Films

Candela, George A., Chandler-Horowitz, Deane, Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 4.46 MB

english, 1984

13

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Semiconductor Wafer Inspection

Baker, Lionel R., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 9.26 MB

english, 1984

14

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Temperature and Chemical Vapor Deposition (CVD) film effects on wafer flatness

Gise, Peter, Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 120 KB

english, 1982

15

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Scanning Microscopy Instrumentation - Application of a 2-D atomic force microscope system to metrology

Nyyssonen, Diana, Landstein, Laszlo, Coombs, E., Kino, Gordon S.

Year:

1992

Language:

english

File:

PDF, 222 KB

english, 1992

16

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Photoresist Thickness Measurements Using Energy Dispersive X-Ray Spectroscopy

Mieth, M., Barker, R. A., Packer, S. L., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 3.71 MB

english, 1984

17

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Making Of Secondary Standards From National Bureau Of Standards (NBS) Photomask Standard

Auyeung, ManLung, Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 354 KB

english, 1982

18

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Optical Linewidth Measurement On Patterned Metal Layers

Nyyssonen, D., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 397 KB

english, 1984

19

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Inspection In The Third Dimension: Metal Mask Inspection Problems

Levine, Joseph E., MacKinnon, Donald A., Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 13.40 MB

english, 1982

20

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - A Fluorescent Linewidth Measurement System For Vlsi Fabrication

Erasmus, Stephen J., Reed, Michael L., Kaempf, Ulrich, Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 2.42 MB

english, 1984

21

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Application Of Electron - Optical Instruments For Measuring Small Pattern Features In Microlithography

Plontke, Reiner, Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 4.07 MB

english, 1984

22

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Moire Technique For Overlay Metrology

Brunner, T. A., Smith, S. D., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 1.98 MB

english, 1984

23

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Measurement Of Optical Performance Of Photolithographic Lenses

Webb, James E., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 388 KB

english, 1984

24

SPIE Proceedings [SPIE 1985 Microlithography Conferences - Santa Clara (Monday 11 March 1985)] Optical Microlithography IV - A Practical Method For Edge Detection And Focusing For Linewidth Measurements On Wafers

Nyyssonen, Diana, Stover, Harry L.

Year:

1985

Language:

english

File:

PDF, 357 KB

english, 1985

25

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Use Of The National Bureau Of Standards (NBS) Antireflective (AR)-Chromium Optical Linewidth Standard For Measurements On Other Types Of Chromium Photomasks

Jerke, John M., Wendell, Charles E., Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 513 KB

english, 1982

26

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Metrology, Inspection, and Process Control for Microlithography X - Collection of low-energy secondary electrons and imaging in a low-voltage SEM

Nyyssonen, Diana, Jones, Susan K.

Year:

1996

Language:

english

File:

PDF, 418 KB

english, 1996

27

SPIE Proceedings [SPIE 1988 Microlithography Conferences - Santa Clara, CA (Wednesday 2 March 1988)] Integrated Circuit Metrology, Inspection, and Process Control II - A New Line Width Standard For Reflected Light Inspection

Monteverde, Robert, Nyyssonen, Diana, Monahan, Kevin M.

Year:

1988

Language:

english

File:

PDF, 272 KB

english, 1988

28

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Overlay Characterization Of Projection Aligners Using Electrical Probe Techniques

Ausschnitt, C. P., Brunner, T. A., Yang, S. C., Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 3.95 MB

english, 1982

29

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - A New Technique For Linewidth Measurement On 1 Pm Geometry Process Wafers Using Fluorescence

Chisholm, James J., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 5.87 MB

english, 1984

30

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - A Double Pass Attachment For The Linear And Plane Mirror Interferometer

Baldwin, Richard R., Siddall, Graham J., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 2.45 MB

english, 1984

31

SPIE Proceedings [SPIE 1989 Microlithography Conferences - San Jose, CA (Monday 27 February 1989)] Integrated Circuit Metrology, Inspection, and Process Control III - Linewidth Edge Detection Algorithm for Coherent Image Profiles

Nyyssonen, Diana, Monteverde, Bob, Monahan, Kevin M.

Year:

1989

Language:

english

File:

PDF, 204 KB

english, 1989

32

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Optical Measurement Uncertainties And, Process Tolerances

Grant, Peter, Fahey, Tim, Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 144 KB

english, 1984

33

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Sem Metrology: Effects Due To Topography And Composition

Monahan, K., Gates, D., Mah, W., Richardson, B., Wilcox, J., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 408 KB

english, 1984

34

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Ellipsometric Accuracy And The Principal Angle Of Incidence

Chandler-Horowitz, Deane, Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 329 KB

english, 1982

35

SPIE Proceedings [SPIE 1985 Microlithography Conferences - Santa Clara (Monday 11 March 1985)] Optical Microlithography IV - Modeling The Optical Microscope Images Of Thick Layers For The Purpose Of Linewidth Measurement

Kirk, Chris P., Nyyssonen, Diana, Stover, Harry L.

Year:

1985

Language:

english

File:

PDF, 427 KB

english, 1985

36

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Overlay Analysis Of Step-And-Repeat Lithographic Systems For Mask Making

Hsia, L. C., Su, L. S., West, R. L., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 359 KB

english, 1984

37

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Development Of Sem-Based Dedicated Ic Metrology System

Russell, P. E., Namae, T., Shimada, M., Someya, T., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 2.32 MB

english, 1984

38

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Monitoring Wafer Stepper Performance With Electrical Test Structures

Mitchell, M. A., Nagaswami, V., Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 191 KB

english, 1982

39

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Photomask Iinewidth Measurement Correlation Techniques Using The Standard Reference Material (SRM) 474 National Bureau Of Standards (NBS) Linewidth Standard

Caprari, F., Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 2.10 MB

english, 1982

40

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Infrared Ellipsometry On Silicon Wafers

Leonard, Thomas A., Loomis, John S., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 420 KB

english, 1984

41

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Automatic Detection And Quantification Of Contaminants On Reticles For Semiconductor Microlithography

Quackenbos, George, Broude, Sergey, Chase, Eric, Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 3.06 MB

english, 1982

42

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Critical Dimension Measurement In The Scanning Electron Microscope

Postek, Michael T., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 10.10 MB

english, 1984

43

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Method Of Characterizing Wafer Steppers

Van Peski, Chris, Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 193 KB

english, 1982

44

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Analysis Of Linewidth Measurement Techniques For The Purpose Of Automation.

Kirk, Chris P., Moore, Derek S., Nelson, John C., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 287 KB

english, 1984

45

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Thickness And Refractive Index Measurements By Light Coupling: Design Guidelines Of A Prism Coupler

Paul, Dilip K., Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 472 KB

english, 1982

46

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Improving Registration In Photolithography

Rottmann, H. R., Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 281 KB

english, 1982

47

SPIE Proceedings [SPIE 1984 Technical Symposium East - Arlington (Tuesday 1 May 1984)] Integrated Circuit Metrology II - Aim-An Automated Inspection Microscope For Measuring Critical Dimensions

LeMaster, Ronald J., Nyyssonen, Diana

Year:

1984

Language:

english

File:

PDF, 8.58 MB

english, 1984

48

SPIE Proceedings [SPIE Developments in Semiconductor Microlithography II - San Jose (Saturday 1 January 1977)] Developments in Semiconductor Microlithography II - Comparison Of Linewidth Measurements On An Sem/Interferometer System And An Optical Linewidth-Measuring Microscope

Jerke, John M., Hartman, Arie W., Nyyssonen, Diana, Swing, Richard E., Young, Russell D., Keery, William J., Giffin, James W.

Year:

1977

Language:

english

File:

PDF, 5.14 MB

english, 1977

49

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Electrical Test Methods For Evaluating Lithographic Processes And Equipment

Yen, Dwight, Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 3.88 MB

english, 1982

50

SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Comparison Of Optical And Mechanical Methods Of Thickness Measurement

Feldman, Albert, Vorburger, Theodore, Nyyssonen, Diana

Year:

1982

Language:

english

File:

PDF, 2.07 MB

english, 1982

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